May 21, 2024

Comment: MOCVD barriers are not insurmountable


Source: China Electronics News, May 07, 2010, 19:18, I have two sentences (0) copy link, large, medium, small, medium, small, medium, small, medium and small, reporter Zhu Lingzhen

In the entire industry chain of materials and equipment, epitaxial wafer growth, chip manufacturing, packaging and application, the LED industry once again becomes a weak link that restricts the development of the industry. Industry experts said that in order for China's LED industry to develop healthily and rapidly, we must work hard on key equipment and raw materials.

Upstream critical equipment also needs to rely on imports

· A wide variety of LED production equipment

·Key equipment is almost completely dependent on imports

According to reports, in the LED production process requires a lot of equipment, from single crystal furnaces for sapphire substrate processing, multi-wire cutting, grinding and polishing equipment, to MOCVD (metal organic compound chemical vapor deposition), annealing furnaces and other equipment, and then Equipment similar to IC chip technology, such as lithography machine, etching machine, cleaning machine, evaporation coating, etc., and finally to the solid crystal machine for packaging, gold wire / aluminum wire ball welder, sorting machine, etc. various kinds. Among them, MOCVD, plasma etching machines and other high-tech equipment, domestic production lines all rely on imports. Only a few kinds of equipment have been domestically produced, such as the single-wire cutting machine, multi-function adhesive machine, automatic wire bonding machine, spectroscopic machine, grinding wheel dicing machine, laser cutting machine, etc. They are already used on the user's production line.

Hu Xiaoyu, deputy director of the 48th R&D center of CEC Technology Group, said in an interview with China Electronics News that it was limited by the overall low level of domestic equipment manufacturing industry, coupled with the extrusion of imported equipment and the blockade of foreign equipment patent technology. Domestic LED equipment (including some IC chip manufacturing equipment) is generally behind the level, basically at the laboratory level, and there is still a great deal in terms of equipment capacity, process level, consistency, uniformity and reliability compared with the international advanced level. difference. He said that in recent years, relevant research units in China have made some attempts on LED production equipment, and made some breakthroughs in technology, such as single crystal furnaces, grinding and polishing machines, etc., but most of them are not used in production lines. Therefore, there is still a long way to go for domestic LED equipment to enter the large production line.

“The most critical upstream equipment in the LED industry chain is completely blank and needs to be imported. For example, MOCVD epitaxial equipment mainly comes from the United States, Germany and the United Kingdom. In the middle reaches, equipment for producing chips is now available for some companies, such as etching. Machine, the effect is ok, but there is still a big gap compared with foreign equipment." Wang Min, vice president of Jingneng Optoelectronics (Jiangxi) Co., Ltd. told reporters.

According to industry insiders, most of the LED equipment encountered cost problems in the development process. Most of the components of the equipment are imported products, and the price of the equipment is much lower than that of foreign equipment, which makes the profit margin of the equipment very low. "At present, large-scale LED companies enjoy the national equipment import tax exemption policy, which is very unfavorable for our own research and development equipment," said Wang Haiming, deputy director of the 45th marketing department of China Electronics Technology Group.

Equipment development and process should be closely integrated

· Completely cloning photovoltaic equipment does not work

·Around the process development to adapt to the needs

Domestic equipment has played a big role in the solar photovoltaic industry chain. Can domestic LED equipment also make up for the missing link in the LED industry chain? Hu Xiaoyu said that the LED industry and the solar industry have many similarities, but there are also great differences. If the domestic LED equipment completely clones the photovoltaic equipment, it will not work. Among all the photovoltaic devices, no one has the same proportion of investment in the entire LED production equipment as MOCVD. Domestic LED equipment manufacturers must make breakthroughs from MOCVD equipment, and gradually expand the forward and downstream process equipment, and finally realize the localization of all equipment in the entire industrial chain. The technical threshold of MOCVD equipment is very high, and it is necessary to overcome many difficulties, invest a lot of manpower, material resources, financial resources, and integrate various advantageous resources, but this is not insurmountable.

Jin Cunzhong, secretary general of the China Electronics Special Equipment Industry Association, told reporters that LEDs are not like photovoltaic equipment, and they have higher requirements for technology and technology. At present, many domestic equipment manufacturers are weak in strength, low in R&D level, and poor control of production processes of key components. The stability and reliability of domestically produced equipment are still not up to standard, which leads domestic manufacturers to buy even if they spend big money. Foreign equipment. Therefore, in order to make a difference in the development of the LED industry, domestic equipment must make a good article on stability and consistency.

Wang Haiming said that in the LED production, the former process needs to break through MOCVD. The equipment is the key equipment for chip manufacturing. The equipment has long relied on imports. The price of a single unit is about 30 million yuan, which has restricted the development of LED chip manufacturing in China for a long time. In the latter packaging equipment, the demand for high-speed automatic gold wire bonding machines is large, and it is not possible to provide equipment in batches in China.

Wang Min said that MOCVD is not insurmountable and can be made in China. However, it is difficult to achieve a high level. At present, this capability is not available. He emphasized that MOCVD production equipment can introduce foreign technology, and it would be slower if it relies entirely on its own research and development.

LED has developed to the present day, and the factors that restrict its large-scale promotion are the development level of the upstream equipment industry. According to statistics, the depreciation of the LED equipment industry now accounts for 1/3 of the cost. Therefore, if most of the LED equipment can be localized, it is possible to significantly reduce the production cost of LEDs and let LEDs enter thousands of households.

Wang Min said that the reason why domestic equipment is not on the big production line is related to the low overall level of the domestic equipment industry. The foundation of China's equipment industry has been relatively weak. Even though LED applications are in full swing, the upstream materials and equipment have not received the attention they deserve. At present, there are still no large companies with great strength to tackle them. In addition, the state should also focus its financial resources to support the equipment industry and set up special projects. At the same time, the state must have specific incentives to encourage the use of domestic equipment. "It is also necessary to emphasize that the equipment is actually the curing of the process, and the equipment company should jointly develop with the production enterprise, so that it can solve the problem of disconnection from the process relatively quickly," said Wang Min.

In fact, professionals have long pointed out that equipment is the product of process materialization. Only equipment that is low in cost and high in stability around the production process can adapt to the needs of the production line, and can be improved and improved in practice, and finally combined with its own Process technology develops more advanced equipment. Hu Xiaoyu said that the process is based on equipment and the carrier, and the equipment is the process. The equipment that leaves the process is like a human being without a soul. “Our solar cell production equipment is developed into a good situation today through close integration with the process,” he said.

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